Browsing by Author "Hoshino, Manabu"
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Publication Development of main chain scission type photoresists for EUV lithography
Proceedings paper2019, International Conference on Extreme Ultraviolet Lithography 2019, 15/09/2019, p.111470JPublication Development on main chain scission resists for high-NA EUV lithography
Proceedings paper2023, Conference on Advances in Patterning Materials and Processes XL, FEB 27-MAR 01, 2023, p.Art. 1249807Publication Improved resolution with main chain scission resists for EUV lithography
Proceedings paper2022, Conference on Advances in Patterning Materials and Processes XXXIX Part of SPIE Advanced Lithography and Patterning Conference, APR 24-MAY 27, 2022, p.Art. 120550E