Browsing by Author "Howard, Dave"

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De Meyer, Kristin

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Evans, A.

Proceedings paper

1998, Proceedings of the 28th European Solid-State Device Research Conference - ESSDERC'98; 8-10 Sept. 1998; Bordeaux, France., p.148-151

Publication

A reliability study of titanium silicide lines using micro-raman spectroscopy and electron microscopy

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Howard, Dave

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Rasras, Mahmoud

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Lauwers, A.

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Groeseneken, Guido

Journal article

1997, Microelectronics and Reliability, (37) 10_11, p.1591-1594

Publication

A reliability study of titanium silicide lines using micro-Raman spectroscopy and electron microscopy

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Howard, Dave

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Rasras, Mahmoud

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Lauwers, A.

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Groeseneken, Guido

Proceedings paper

1997, Proceedings of 8th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis - ESREF 97; October 1997., p.1591-1594

Publication

An improved technology for elevated source/drain MOSFETS

Waite, Andrew Michael

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Howard, Dave

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Kubicek, Stefan

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De Meyer, Kristin

Proceedings paper

1997, ESSDERC '97: Proceedings of the 27th European Solid-State Device Research Conference, 22/09/1997, p.256-258

Publication

Comparative growth kinetics of SiGe in a commercial reduced pressure chemical vapour deposition EPI reactor and anomalies during growth of thin Si layers on SiGe

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Loo, Roger

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Brijs, Bert

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Vandervorst, Wilfried

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Howard, Dave

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Kimura, K.

Proceedings paper

1998, Epitaxy and Applications of Si-Based Heterostructures, 13/04/1998, p.339-344

Publication

Experimental validation of mechanical stress models by micro-Raman spectroscopy

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Pozzat, G.

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Pinardi, Kuntjoro

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Howard, Dave

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Ignat, M.

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Jain, Suresh

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Maes, Herman

Proceedings paper

1996, Proceedings ESREF '96 - 7th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, 8/10/1996, p.1751-1754

Publication

Experimental validation of mechanical stress models by micro-Raman spectroscopy

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Pozzat, G.

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Pinardi, Kuntjoro

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Howard, Dave

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Ignat, M.

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Jain, Suresh

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Maes, Herman

Journal article

1996, Microelectronics and Reliability, 36, p.1751-1754

Publication

Influence of grown-in defects on the optical and electrical properties of Si/Si 1-xGex/Si heterostructures

Loo, Roger

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Simoen, Eddy

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Howard, Dave

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Goryll, M.

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Klaes, D.

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Vescan, L.

Journal article

1998, Thin Solid Films, 336, p.227-231

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Local identification and mapping of the C49 and C54 titanium phases in submicron structures by micro-Raman spectroscopy

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Howard, Dave

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Lauwers, Anne

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Maes, Herman

Journal article

1997, Appl. Phys. Lett., (70) 17, p.2262-2264

Publication

Mechanical stress in and surrounding CoSi2 and TiSi2 lines

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Howard, Dave

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Maes, Herman

Proceedings paper

1996, Proceedings of the 26th European Solid-State Device Research Conference - ESSDERC, 9/09/1996, p.609-612

Publication

On the spatial resolution in analytical electron microscopy

Armigliato, A.

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Howard, Dave

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Balboni, R.

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Frabboni, S.

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Journal article

1998, Mikrochim. Acta [Suppl.], 15, p.59-64

Publication

Phase and mechanical stress in and surrounding TiSi2 and CoSi2 lines studied by micro-Raman spectroscopy

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Howard, Dave

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Maes, Herman

Proceedings paper

1996, Advanced Metallization for Future ULSI, 7/04/1996, p.47-52

Publication

SEG Si: facet control and selectivity vs. nitride and oxide pattern

Howard, Dave

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Oral presentation

1997, Materials Research Society 1997 Spring Meeting : Symposium on Epitaxial Growth - Principles and Applications; March 31 - April 2

Publication

Stress in silicon due to the formation of self aligned poly-CoSi2 lines studied by micro-Raman spectroscopy

Howard, Dave

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Bender, Hugo

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Proceedings paper

1996, Silicide Thin Films - Fabrication, Properties, and Applications, 27/11/1995, p.251-256

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TiSi2 and CoSi2: relevant materials issues for deep sub-micron technologies

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Howard, Dave

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