Browsing by Author "Huang, Yan-Hua"
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Publication Epitaxial SiGe:B for advanced p-MOS contacts: low contact resistivities achieved by optimizing strain in SiGe and thermal treatments applied to contacts
Meeting abstract2019, 2019 EMRS fall meeting, 16/09/2019Publication Improving the electrical properties of epitaxial SiGe:B with excimer laser annealing treatments
Meeting abstract2019, 2019 E-MRS Fall Meeting, 16/09/2019Publication Selective epitaxial p-SiGe source-drain contacts: low contact resistivity (1.5x10-9 ohm.cm2) by optimizing strain and doping concentration
Proceedings paper2019, Extended Abstracts of the 2019 International Conference on Solid State Devices and Materials - SSDM, 2/09/2019, p.601-602Publication Very low temperature epitaxy of group-IV semiconductors for use in FinFET, stacked nanowires and monolithic 3D integration
Oral presentation2019, Nagoya University