Browsing by Author "Iino, Hideaki"
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Publication Characterization of Wetting of Deep Silica Nanoholes by Aqueous Solutions Using ATR-FTIR
Journal article2021, Solid State Phenomena, (314) 1, p.150-154Publication Functional water solutions to enable advanced wet cleaning process for next generation semiconductor device manufacturing
Meeting abstract2021, Ultrapure Micro 2021 Annual Conference, 3-5 November 2021Publication Pre-Epi Clean of SiGe 20%: GeH4 and HCl vs H2-based in-situ cleaning
Meeting abstract2018-05, 9th International SiGe Technology and Device Meeting / 11th International Conference on Silicon Epitaxy and Heterostructures, 27/05/2018, p.193-194Publication Study of cobalt etch control by pH and oxidizer
Meeting abstract2018, Surface Preparation and Cleaning Conference - SPCC, 9/04/2018Publication Study on Alternative Dipole Material Wet Clean by pH Controlled Functional Water
Proceedings paper2023-08, UCPSS - 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, September 2023, p.69-73Publication Study on La2O3 wet clean by pH controlled functional water
Proceedings paper2019, 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16), 13/10/2019, p.21-26