Browsing by Author "Illiberi, Andrea"
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Publication Dielectric on dielectric area-selective deposition by a combination of atomic layer deposition and organic film passivation for self-aligned via patterning
Meeting abstract2018, ASD 2019, 4/04/2019, p.24-24Publication Localized power spectral density analysis on atomic force microscopy images for advanced patterning applications
Proceedings paper2019, Metrology, Inspection, and Process Control for Microlithography XXXIII, 24/02/2019, p.109591OPublication Low-Temperature Dechlorosilylation Chemistry for Area-Selective Deposition of Ge2Sb2Te5 and Its Mechanism in Nanopatterns
Journal article2024, CHEMISTRY OF MATERIALS, (36) 12, p.5943-5952Publication Scatterometry and AFM measurement combination for area selective deposition process characterization
Proceedings paper2019, Metrology, Inspection, and Process Control for Microlithography XXXIII, 24/02/2019, p.109591N