Browsing by Author "Iwahata, Shota"
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Publication Controlled ALE-type recess of molybdenum for future logic and memory applications
Proceedings paper2021, IEEE International Interconnect Technology Conference (IITC), JUL 06-09, 2021Publication Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution
Journal article2023, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, (41) 3, p.Art. 032601Publication Functional water solutions to enable advanced wet cleaning process for next generation semiconductor device manufacturing
Meeting abstract2021, Ultrapure Micro 2021 Annual Conference, 3-5 November 2021