Browsing by Author "Kaiser, Monja"
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Publication Experimental studies of dose retention and activation in fin field-effect-transistor-based structures
Journal article2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1H5-C1H13Publication Experimental studies of dose retention and activation in FinFet-based structures
Proceedings paper2009, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 26/04/2009Publication Minimization of the MuGFET contact resistance by integration of NiSi contacts on epitaxially raised source/drain regions
Publication The influence of TiN thickness and SiO2 formation method on the structural and electrical properties of TiN/HfO2/SiO2 gate stacks
Journal article2009, IEEE Transactions on Electron Devices, (56) 7, p.1548-1553