Browsing by Author "Kaneko, Shinya"
Now showing 1 - 4 of 4
- Results per page
- Sort Options
Publication Characterization and optimization of porogen based PECVD deposited extreme low-k materials as a function of UV-cure time
Journal article2007, Surface and Coatings Technology, (201) 22_23, p.9264-9268Publication Deposition and characterization of porogen based PECVD deposited and UV-cured extreme low-k materials
Proceedings paper2007, 16th European Conference on Chemical Vapor Deposition - EUROCVD, 16/09/2007Publication Improved low-k dielectric properties using He/H2 plasma for resist removal
Publication Spectroscopic ellipsometry and ellipsometric porosimetry studies of CVD low-k dielectric films
Journal article2008, Physica Status Solidi C, (5) 5, p.1253-1256