Browsing by Author "Kang, Seulki"

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Advanced high voltage e-beam system combined with an enhanced D2DB for on-device overlay measurement

Kang, Seulki
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Maruyama, Kotaro
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Yamazaki, Yuichiro
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Beggiato, Matteo
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Veloso, Anabela
Proceedings paper
2023, Conference on Metrology, Inspection, and Process Control XXXVII, FEB 27-MAR 02, 2023, p.Art. 124961W
Applications of large field of view e-beam metrology to contour-based optical proximity correction modeling

Wei, Chih-, I
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Kang, Seulki
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Das, Sayantan
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Oya, Masahiro
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Okamoto, Yosuke
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Maruyama, Kotaro
Journal article
2023, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (22) 4, p.Art. 041603
E-beam metrology-based EUVL aberration monitoring

Kang, Seulki
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Miura, Yuji
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Maruyama, Kotaro
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Yamazaki, Yuichiro
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Wei, Chih-, I
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Maguire, Ethan
Proceedings paper
2022, Conference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference, FEB 24-MAY 27, 2022, p.120530Z
Massive e-beam metrology and inspection for analysis of EUV stochastic defect

Kang, Seulki
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Maruyama, K.
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Yamazaki, Z.
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De Simone, Danilo
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Rincon Delgadillo, Paulina
Proceedings paper
2021, Metrology, Inspection, and Process Control for Microlithography XXXIV, 22/02/2021, p.1161129