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Browsing by Author "Karakaya, Koray"

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    Characterization of epitaxial Pb(Zr,Ti)O3 thin films deposited by pulsed laser deposition on silicon cantilevers

    Nguyen, M.D.
    ;
    Nazeer, H.
    ;
    Karakaya, Koray
    ;
    Pham, S.V.
    ;
    Steenwelle, R.
    ;
    Dekkers, M.
    ;
    Abelmann, L.
    Journal article
    2010, Journal of Micromechanics and Microengineering, (20) 8, p.85022
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    Effect of built-in stress level of piezoelectric AlN thin films on the properties of vibrational energy harvesters

    Karakaya, Koray
    ;
    Renaud, Michael
    ;
    Goedbloed, Martijn
    ;
    Vullers, Ruud
    Proceedings paper
    2007, PowerMEMS. The 7th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, 28/11/2007, p.205-208
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    Effect of the built-in stress level of AlN layers on their dielectric and piezoelectric properties with perspectives on energy harvesting

    Karakaya, Koray
    ;
    Renaud, Michael
    ;
    Goedbloed, Martijn
    ;
    van Schaijk, Rob
    Journal article
    2008, Journal of Micromechanics and Microengineering, (18) 10, p.104012
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    Fabrication, modelling and characterization of MEMS piezielectric vibration harvesters

    Renaud, Michael
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    Karakaya, Koray
    ;
    Sterken, Tom  
    ;
    Fiorini, Paolo
    ;
    Van Hoof, Chris  
    ;
    Puers, Bob  
    Journal article
    2008, Sensors and Actuators A: Physical, 145-146, p.380-386
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    Influence of poling on RF and pulsed DC sputtered PZT thin films

    Jambunathan, Madhu
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    Karakaya, Koray
    ;
    Elfrink, Rene  
    ;
    Vullers, Ruud
    ;
    van Schaijk, Rob
    Proceedings paper
    2011, International Symp. on Applications of Ferroelectrics (ISAF/PFM) and International Symp. on Piezoresponse Force Microscopy ..., 24/07/2011

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