Browsing by Author "Kayser, Sven"
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Publication A holistic approach of SIMS analysis for advanced semiconductor structures
Proceedings paper2019, SIMS 22 - 22nd International Conference on Secondary Ion Mass Spectrometry, 20/10/2019Publication Advanced semiconducting structure analysis with Self-Focusing SIMS and improved mass resolution in a Hybrid SIMS instrument
Proceedings paper2018, SIMS Europe 2018, 16/09/2018Publication Advanced semiconducting structure analysis with Self-Focusing SIMS and improved mass resolution in a Hybrid SIMS instrument
Proceedings paper2019, French users meeting ToF-SIMS, 14/03/2019Publication Hybrid SIMS: How the orbitrap mass analyzer can improve the self-focusing SIMS concept for advanced semiconductor structures
Proceedings paper2019, FCMN 2019 - International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, 2/04/2019Publication Hybrid SIMS: New possibilities for advanced semiconductor structure analysis with self-focusing SIM
Proceedings paper2019, Festkörperanalytik - Conference on Solid State Analysis, 1/07/2019Publication Hybrid SIMS: New possibilities for advanced semiconductor structure analysis with Self-Focusing SIMS
Proceedings paper2019, ECASIA (European Conference on Applications for Surface and Interface Analysis), 15/09/2019Publication New possibilities for advanced semiconductor structure analysis by combining SIMS with SPM and high performance mass spectrometry
Oral presentation2020, Microscopy & Microanalysis 2020 MeetingPublication Thin photoresist layers for microelectronic devices: a comparative study between ToF and Orbitrap™ mass analyzers.
Oral presentation2019, SIMS 22