Browsing by Author "Kim, Kee - Ho"
Now showing 1 - 3 of 3
- Results Per Page
- Sort Options
Publication CD control for 180-nm and 130-nm gate-level lithography
Journal article1996, Microlithography World, Autumn, p.16-21Publication Characterization and optimization of CD control for 0.25µm CMOS applications
Proceedings paper1996, Optical Microlithography IX, 10/03/1996, p.555-563Publication Feasability demonstration of 0.18 µm and 0.13 µm optical projection lithography based on CD control calculations
Proceedings paper1996, Symposium on VLSI Technology. Digest of Technical Papers, 11/06/1996, p.186-187