Browsing by Author "Kimura, Y."
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Publication 15nm HP patterning with EUV and SADP: key contributors for improvement of LWR, LER, and CDU
Proceedings paper2013, Advanced Etch Technology for Nanopatterning II, 23/02/2013, p.86850CPublication Novel junction design for NMOS Si bulk-FinFETs with extension doping by phosphorus doped silicate glass
Meeting abstract2015, IEEE International Electron Devices Meeting - IEDM, 7/12/2015, p.596-599Publication The influence of post-etch InGaAs Fin profile on electrical performance
Proceedings paper2013, Extended Abstracts of the International Conference on Solid State Devices and Materials - SSDM, 24/09/2013, p.700-701