Browsing by Author "Kissoon, Nicola N."
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Publication Actinic inspection of the extreme ultraviolet optical parameters of lithographic materials enabled by a table-top, coherent extreme ultraviolet source
Journal article2024, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (23) 4, p.Art. 041406Publication Image contrast metrology for EUV lithography
Proceedings paper2022-09-29, International Conference on Extreme UltraViolet Lithography, SEP 26-29, 2022, p.122920APublication Voltage contrast determination of design rules at the limits of EUV single patterning
Journal article2023, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (22) 4, p.Art. 041604