Browsing by Author "Kojima, Shinichi"

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Digital pattern generator: an electron-optical MEMS for massively parallel reflective electron beam lithography

Grella, Luca
;
Carroll, Alan
;
Murray, Kirk
;
McCord, Mark A.
;
Tong, William M.
;
Brodie, Alan D.
Journal article
2013, Journal of Micro/Nanolithography MEMS and MOEMS, (12) 3, p.31107
High-NA EUV Mask CD-SEM Metrology Matching, and Contour-based Comparison of Simulation Result and Wafer Print

Bekaert, Joost
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Schatz, Jirka
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Hosoya, Sotaro
;
Komami, Hideaki
;
Roy, Syamashree
Proceedings paper
2025, Photomask Technology, 2025-09-22, p.1368713
High-NA EUV mask pattern characterization using advanced mask CD-SEM metrology

Bekaert, Joost
;
Baskaran, Balakumar
;
Van Look, Lieve
;
Franke, Joern-Holger
;
Philipsen, Vicky
Proceedings paper
2024, 39th European Mask and Lithography Conference (EMLC), JUN 17-19, 2024, p.Art. 132730S