Browsing by Author "Koshihara, Shunsuke"
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Publication Enabling CD SEM metrology for 5nm technology node and beyond
Proceedings paper2017, Metrology, Inspection, and Process Control for Microlithography XXXI, 26/02/2017, p.1014512Publication Impact of annealing temperature on DSA process: toward faster assembly kinetics
Proceedings paper2018, Advances in Patterning Materials and Processes XXXV, 24/02/2018, p.105860TPublication LCDU and placement improvement of contacts using EUV templated DSA
Oral presentation2018, SPIE 2018Publication Line width roughness accuracy analysis during pattern transfer in self-aligned quadruple patterning process
Proceedings paper2016, Metrology, Inspection, and Process Control for Microlithography XXX, 21/02/2016, p.97780V