Browsing by Author "Kubota, M."
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Publication Cleaning of metal contamination
Proceedings paper1994, Contamination Control and Defect Reduction in Semiconductor Manufacturing III, 23/05/1994, p.241-252Publication Current status and addressing the challenges of Hf-based gate stack toward 45nm-LSTP application
Publication Ni-FUSI on high-k as a candidate for 65nm LSTP CMOS
Proceedings paper2005-04, Proceedings IEEE VLSI-TSA International Symposium on VLSI Technology, 25/04/2005, p.99-100Publication Prospect of Hf-based gate dielectric by PVD with FUSI gate for LSTP application