Browsing by Author "Leroy, F."
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Publication A novel low temperature etch approach to reduce ULK plasma damage
Meeting abstract2015, Plasma Etch and Strip in Microtechnology - PESM, 27/04/2015Publication Cryogenic etching of porous organosilicate low-k materials: reduction of plasma induced damage
Meeting abstract2015, AVS 62nd International Symposium & Exhibition, 19/10/2015, p.124Publication Cryogenic etching processes applied to porous low-k materials using C4F8/SF6 plasmas
Journal article2015, Journal of Physics D: Applied Physics, (48) 43, p.435202Publication Reduction of plasma induced damage of porous low-k materials using a cryogenic etching process
Proceedings paper2015, 22nd International Symposium on Plasma Chemistry - ISPC, 5/07/2015, p.O-8-1