Browsing by Author "Leusink, Gert"
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Publication Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: a physics and chemistry perspective
Journal article2019, Japanese Journal of Applied Physics, (58) SE, p.SE0801Publication Ruthenium recess for buried power rail integration
Meeting abstract2019, IITC-MAM 2019, 3/06/2019, p.4.08Publication Ultralow resistive wrap around contact to scaled FinFET devices by using ALD-Ti contact metal
Proceedings paper2017, IEEE International Interconnect Technology Conference - IITC, 16/05/2017, p.1-3