Browsing by Author "Ling, Fangzhou"
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Publication An investigation of stiction in Poly-SiGe micromirror
Proceedings paper2011, IEEE 61st Electronic Components and Technology Conference - ECTC, 31/05/2011, p.157-162Publication Dedicated test structure for the measurement of adhesion forces between contacting surfaces in MEMS devices
Proceedings paper2013-06, 17th International Conference on Solid-State Sensors, Actuators and Microsystems, 16/06/2013, p.2692-2695Publication Investigation of in-use stiction and adhesion in poly-SiGe MEMS
Ling, FangzhouPHD thesis2013-03Publication Investigation of temporary stiction in poly-SiGe micromirror arrays
Proceedings paper2011, 16th International Conference on Solid-State Sensors, Actuators and Microsystems - Transducers, 5/06/2011, p.2378-2381Publication Investigation of temporary stiction in poly-SiGe micromirror arrays
Journal article2012, Sensors and Actuators A: Physical, 188, p.320-328Publication Processing assessment and adhesion evaluation of copper through-silicon vias (TSVs) for three-dimensional stacked-integrated circuit (3D-SIC) architectures
; ; ; Travaly, YoussefJournal article2010, Microelectronics Reliability, (50) 9_11, p.1636-1640Publication Stiction reduction in electrostatic poly-SiGe micromirrors by applying a self-assembled monolayer film
; Publication Study of glass frit induced stiction using a micromirror array
Journal article2012, Microelectronics Reliability, (52) 9_10, p.2256-2260