Browsing by Author "Lu, J.P"
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Publication Impact of sub-melt laser annealing on Si1-xGex source/drain defectivity
Proceedings paper2007, 15th IEEE Conference on Advanced Thermal Processing of Semiconductors - RTP, 2/10/2007, p.307-315Publication Impact of the Ge content and the epitaxial thickness on the bandgap shrinkage induced leakage current of recessed Si1-xGex source/drain junctions
Proceedings paper2007, Workshop on Semiconductor Advances for Future Electronics and Sensors - SAFE, 29/11/2007, p.496-200Publication Stress analysis of Si1-xGex embedded source/drain junctions
Journal article2008, Materials Sicience in Semiconductor Processing, (11) 5, p.285-290