Browsing by Author "MKuppuswamy, Vijaya Kumar"
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Publication Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
Oral presentation2014, FujiFilm Electronic Materials WrokshopPublication Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
Oral presentation2014, Photomask Technology (BACUS 2014)Publication Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
Proceedings paper2014, 30th European Mask and Lithography Conference - EMLC, 24/06/2014, p.92310RPublication Effect of processing parameters on self-assembly of cylindrical phase PS-b-PMMA BCPs on 300 mm Si wafers
Meeting abstract2014, 58th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - EIPBN, 27/05/2014Publication Line Edge Roughness on Directed Self Assembly: Impact of process conditions
Publication PMMA removal in diblock copolymer P(S-b-MMA) self-assembly process
Meeting abstract2014, Plasma Etch and Strip Processes for Micro and Nano- Technologies - PESM, 12/06/2014Publication Process optimization of templated DSA flows
Proceedings paper2014, Advances in Patterning Materials and Processes XXXI, 24/02/2014, p.90510IPublication Readying directed self-assembly for patterning in semiconductor manufacturing
Meeting abstract2014, 58th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - EIPBN, 27/05/2014