Browsing by Author "Machida, Kohei"

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Extreme Ultraviolet Lithographic Performance and Reaction Mechanism of Polymeric Resist-Utilizing Radical- and Acid-Amplified Cross-Linking

Naqvi, Bilal
;
Enomoto, Satoshi
;
Machida, Kohei
;
Takata, Yui
;
Kozawa, Takahiro
;
Muroya, Yusa
Journal article
2024, CHEMISTRY OF MATERIALS, (36) 3, p.1459-1471
Reaction mechanisms of Sn-complex-side-chain polymer used for extreme ultraviolet lithography, studied by electron pulse radiolysis and & gamma;-radiolysis

Takata, Yui
;
Muroya, Yusa
;
Kozawa, Takahiro
;
Machida, Kohei
;
Enomoto, Satoshi
;
Naqvi, Bilal
Journal article
2023, JAPANESE JOURNAL OF APPLIED PHYSICS, (62) 7, p.Art. 076502