Browsing by Author "Maekawa, K"
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Publication Cryoetching of silicon and advanced materials for 3D interconnects
Meeting abstract2014, ECS Fall Meeting Symposium P5: Processing Materials of 3D Interconnects, Damascene, and Electronics Packaging 6, 5/10/2014, p.1689Publication Cryogenic etching of porous organosilicate low-k materials: fluorine based plasma analysis
Meeting abstract2015, Plasma Etch and Strip in Microtechnology - PESM, 27/04/2015Publication Cryogenic etching processes applied to porous low-k materials using C4F8/SF6 plasmas
Journal article2015, Journal of Physics D: Applied Physics, (48) 43, p.435202