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Browsing by Author "Maes, J. W."

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    Publication

    Backside Power Delivery With Relaxed Overlay for Backside Patterning Using Extreme Wafer Thinning and Molybdenum-Filled Slit Nano Through Silicon Vias

    Zhao, Peng  
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    Witters, Liesbeth  
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    Jourdain, Anne  
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    Stucchi, Michele  
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    Jourdan, Nicolas  
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    Maes, J. W.
    Journal article
    2024, IEEE TRANSACTIONS ON ELECTRON DEVICES, (71) 12, p.7963-7969
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    Multi-Vt Gate Stack Technologies for Nanosheet and CFET Devices

    Arimura, Hiroaki  
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    Franco, Jacopo  
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    Ragnarsson, Lars-Ake  
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    Vandooren, Anne  
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    Brus, Stephan  
    Proceedings paper
    2024, IEEE Silicon Nanoelectronics Workshop (SNW) / Symposium on VLSI Technology and Circuits, 2024-06-15, p.47-48
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    Pure-Metal Replacement Gate for Reliable 30 nm Pitch Scaled 3D NAND Flash

    Rachidi, Sana  
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    Ramesh, Siva  
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    Tierno, Davide  
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    Donadio, Gabriele Luca  
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    Pacco, Antoine  
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    Maes, J. W.
    Proceedings paper
    2024, International Memory Workshop (IMW), 2024-05-12
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    Selective ALD Mo Deposition in 10nm Contacts

    van der Veen, Marleen  
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    Maes, J. W.
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    Varela Pedreira, Olalla  
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    Zhu, C.
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    Tierno, Davide  
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    Datta, S.
    Proceedings paper
    2023, IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM), MAY 22-25, 2023

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