Browsing by Author "Makhotkin, Igor A."
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Publication Actinic inspection of the extreme ultraviolet optical parameters of lithographic materials enabled by a table-top, coherent extreme ultraviolet source
Journal article2024, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (23) 4, p.Art. 041406Publication Laboratory-based 3D X-ray standing-wave analysis of nanometre-scale gratings
Journal article2024, JOURNAL OF APPLIED CRYSTALLOGRAPHY, (57) 5, p.1288-1298Publication The interface study of photoresist/underlayer using hybrid x-ray reflectivity and x-ray standing wave approach
Proceedings paper2024, Conference on Metrology, Inspection, and Process Control XXXVIII, FEB 26-29, 2024, p.1295505