Browsing by Author "Malhouitre, Stephane"
Now showing 1 - 8 of 8
- Results Per Page
- Sort Options
Publication Advanced wafer surface cleaning technology
Oral presentation2004, SEMICON Korea 2004 STS, S5: Contamination-free Manufacturing SeminarPublication Etching of thermal SiO2 in supercritical CO2
Publication Impact of CO2 cryogenic pre-treatment on ion impanted photresist wet cleaning
Proceedings paper2008, Sematech Surface Preparation and Cleaning conference, 31/03/2008Publication Post ion-implant photoresist removal via wet chemical cleans combined with physical force pretreatments
Proceedings paper2007, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10, 7/10/2007, p.219-226Publication Repair and sealing of mesoporous low-k dielectric by supercritical CO2 processing
Proceedings paper2005, SEMATECH Surface Preparation and Cleaning Conference, 19/04/2005Publication ScCO2-based processes in semiconductor manufacturing: Why did it fail ?
Publication Stripping of ion implanted photoresist by Co2 cryogenic pre-treatment followed by wet cleaning
Oral presentation2008, 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSSPublication Supercritical CO2 low-k dielectric repair
Proceedings paper2005, Cleaning Technology in Semiconductor Devices Manufacturing IX, 16/10/2005, p.301-308