Browsing by Author "Mansano, Ronaldo"
Now showing 1 - 7 of 7
- Results per page
- Sort Options
Publication Design and realization of a photolithography alignment and UV exposure equipment for pedagogical and laboratory experiment purposes
Journal article2008, Journal sur l'Enseignement des Sciences et Technologies de l'Information et des Systèmes - J3eA, 7, p.1033Publication Diffraction gratings fabricated in DLC thin flms
Journal article2010, Surface and Coatings Technology, (204) 18_19, p.2966-2970Publication Diffractive optical element applied to proximity exposure lithography exploring partial light coherence
Proceedings paper2010, Latin America Optics and Photonics Conference - LAOP, 27/09/2010Publication Diffractive phase-shift lithography photomask operating in proximity printing mode
Journal article2010, Optics Express, (18) 16, p.16387-16405Publication Digital holography: computer-generated holograms and diffractive optics in scalar diffraction domain
Book chapter2011Publication Investigations of capacitively-coupled plasmas by electrostatic probe technique
Proceedings paper2015, 30th Symposium on Microelectronics Technology and Devices - SBMicro, 31/08/2015, p.1-4Publication Phase-shift photomask designed by scalar diffractiontheory
Proceedings paper2009-09, 24th Symposium on Microelectronics Technology and Devices - SBMicro, 31/08/2009, p.487-497