Browsing by Author "Marrant, Koen"
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Publication Dielectric reliability of 70 nm pitch air-gap interconnect structures
Journal article2011, Microelectronic Engineering, (88) 7, p.1618-1622Publication Dual beam FIB/SEM cross-section imaging of nano-structures
Oral presentation2007, FIBforAllPublication Metrology for implanted Si substrate and dopant loss studies
Meeting abstract2009, 216th ECS Meeting, 4/10/2009, p.2160Publication Metrology for implanted Si substrate and dopant loss studies
Proceedings paper2009, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11, 4/10/2009, p.367-374Publication Metrology for implanted Si substrate loss studies
Journal article2010, Journal of the Electrochemical Society, (157) 5, p.H580-H584Publication TEM analysis in semiconductor industry: R&D examples of future needs
Meeting abstract2010, International Microscopy Congress - IMC17, 20/09/2010