Browsing by Author "Marsik, Premysl"
- Results per page
- Sort Options
Publication Application of UV irradiation in removal of post-etch 193 nm photoresist
Proceedings paper2009, Materials, Processes and Reliability for Advanced Interconnects for Micro and Nanoelectronics, 13/04/2009, p.D02-09Publication Changes of UV optical properties of plasma damaged low-k dielectrics for sidewall damage scatterometry
Publication Effect of pressure on efficiency of UV curing of CVD low-k material at different wavelengths
Publication Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths
Publication Effect of ultraviolet curing wavelength on low-k dielectric material properties and plasma damage resistance
Journal article2011, Thin Solid Films, (519) 11, p.3619-3626Publication Engineering of chemical and physical properties of low-k materials by different wavelength of UV light
Proceedings paper2008, ADMETA: Advanced Metallization Conference, 8/10/2008, p.28-29Publication Improved low-k dielectric properties using He/H2 plasma for resist removal
Publication Improved low-k dielectric properties using He/H2 plasma for resist removal
Meeting abstract2008, Advanced Metallization Conference - AMC, 23/09/2008Publication Multi-plate misalignment artifacts in rotating-compensator ellipsometry: analysis and data treatment
Publication Optical property changes in low-k films upon ultraviolet-assisted curing
Publication Spectroscopic ellipsometry and ellipsometric porosimetry studies of CVD low-k dielectric films
Journal article2008, Physica Status Solidi C, (5) 5, p.1253-1256