Browsing by Author "Mitterbauer, Christoph"
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Publication Characterization of arsenic PIII Implants in FinFETs by LEXES, SIMS and STEM-EDX
Publication Interface sharpness in stacked thin film structures: a comparison of soft X-ray reflectometry and transmission electron microscopy
Journal article2024, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (23) 4, p.Art. 041405Publication Soft X-ray reflectometry for the inspection of interlayer roughness in stacked thin film structures
Proceedings paper2024, Conference on Metrology, Inspection, and Process Control XXXVIII, FEB 26-29, 2024, p.Art. 1295507