Browsing by Author "Monchoix, H."
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Publication Influence of metal and SBT dry-etch on FeCAP properties and role of recovery anneals
Oral presentation2004, International Symposium on Integrated FerroelectricsPublication Integration of ferroelectric SrBi2Ta2O9-based capacitors in 0.35 μm CMOS technology
Journal article2004, Physica Status Solidi C, (1) S1, p.S78-S82Publication Integration of MOCVD SBT stacked ferroelectric capacitors in a 0.35 μm CMOS technology
Journal article2004, Integrated Ferroelectrics, 66, p.71-83Publication Integration of MOCVD SBT stacked ferroelectric capacitors in A 0.35um CMOS technology
Oral presentation2004, The 16th International Symposium on Integrated FerroelectricsPublication MOCVD-SBT thin films for advanced FeRAM: deposition and film formation processes
Publication Oxygen barrier for stacked SBT-FeCAP on W-plug
Meeting abstract2002, International Joint Conference on the Application of Ferroelectrics - IFFF, 28/05/2002, p.274Publication Process and substrate effects on the properties of MOCVD-deposited SrBi2Ta2O9 films
Oral presentation2004, The 16th International Symposium on Integrated Ferroelectrics