Browsing by Author "Mountsier, Tom"
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Publication Layout optimization and trade-off between 193i and EUV-based patterning for SRAM cells to improve performance and process variability at 7nm technology node
Proceedings paper2015, Design-Process-Technology Co-optimization for Manufacturability IX, 22/02/2015, p.94270OPublication New bending mode in SAQP Si fins and its mitigation
Journal article2022, MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, (141) April, p.Art. 106437