Browsing by Author "Muller, Matthias"

ALD on high mobility channels: engineering the proper gate stack passivation

Atomic layer deposition of Al2O3 on S-passivated Ge

Atomic layer deposition of high-k dielectrics on sulphur-passivated germanium

S-passivation of the Ge gate stack using (NH4)2S

S-passivation of the Ge gate stack: Tuning the gate stack properties by changing the atomic layer deposition oxidant precursor

Self-affine surface roughness of chemically and thermally cleaned Ge surfaces

Towards passivation of Ge(100) surfaces by sulfur adsorption from (NH4)2S solution: a combined NEXAFS, STM and LEED study