Browsing by Author "Nakamura, T."
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Publication Detection of Failure Mechanisms in 24-40 nm FinFETs with (spectral) photon emission techniques using InGaAs camera
Journal article2018, Microelectronics Reliability, 88-90, p.334-338Publication Non-invasive soft breakdown localisation in low k dielectrics using photon emission microscopy and thermal laser stimulation
Journal article2019, Microelectronics Reliability, 92, p.73-78Publication Photon emission as a characterization tool for bipolar parasitics in FinFET technology
Journal article2018, Microelectronics Reliability, 88-90, p.273-276Publication Process feasibility investigation of freezing free process
Journal article2009, Journal of Photopolymer Science and Technology, (22) 5, p.647-652