Browsing by Author "Nakano, Teppei"
Now showing 1 - 3 of 3
- Results per page
- Sort Options
Publication Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution
Journal article2023, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, (41) 3, p.Art. 032601Publication Etching of tungsten via a combination of thermal oxide formation and wet-chemical oxide dissolution
Journal article2024, MICROELECTRONIC ENGINEERING, (297) 1 March, p.Art. 112304Publication SiGe selective etching to enable bottom and middle dielectric isolations for advanced gate-all-around FET architecture