imec Institutional Repository Browsing {{ collection }} by Author "Naulleau, Patrick"

Publication

Experimental verification of high-NA imaging simulations using SHARP

Davydova, Natalia

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Liu, Fei

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Benk, Markus

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van Setten, Eelco

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Bottiglieri, Gerardo

Proceedings paper

2020, Conference on Extreme Ultraviolet Lithography, SEP 21-25, 2020

Publication

Need for LWR metrology standardization: the imec roughness protocol

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Sutani, Takeyoshi

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Moussa, Alan

Journal article

2018, Journal of Micro/Nanolithography MEMS and MOEMS, 17, p.41009

Publication

The need for LWR metrology standardization: the imec roughness protocol

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Sutani, Takeyoshi

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Rutigliani, Vito

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Proceedings paper

2018, Metrology, Inspection, and Process Control for Microlithography XXXII, 25/02/2018, p.105850D

Browsing by Author "Naulleau, Patrick"