Browsing by Author "Neuber, Christian"
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Publication Advanced etching for nanodevices and 2D materials
Meeting abstract2016, SNM special session at MNE Conference, 19/09/2016Publication Molecular glass resist performance for nano-pattern transfer
Proceedings paper2015-03, Advanced Etch Technology for Nanopatterning IV, 22/02/2015, p.94280JPublication Molecular glass resists for all-dry high-resolution scanning probe lithography
Publication Molecular glass resists for scanning probe lithography
Publication Single nanometer pattern transfer
Meeting abstract2015, MNE Micro-Nano Engineering Conference / SNM special session, 21/09/2015