Browsing by Author "Neyts, Erik C."

A route towards the fabrication of 2D heterostructures using atomic layer etching combined with selective conversion

Atomic layer etching of amorphous silicon with selectivity towards MoS2

Atomic layer etching of amorphous silicon with selectivity towards MoS2 for novel MX2 heterostructure device concepts

Breakdown of Universal Scaling for Nanometer-Sized Bubbles in Graphene

Investigations on the plasma-surface interaction during atomic layer etching of thin transition-metal dichalcogenide films

Multilayer MoS2 growth by metal and metal oxide sulfurization

Reactive plasma cleaning and restoration of transition metal dichalcogenide monolayers

Selective patterning of amorphous silicon on MoS2 for enabling transition-metal dichalcogenide heterostructures

Selective patterning of amorphous silicon on MoS2 to fabricate transition-metal dichalcogenide heterostructures

Sulfurization of metallic and oxidized molybdenum thin films

The conversion mechanism of amorphous silicon to stoichiometric WS2

Thermal recrystallization of short-range ordered WS2 films

Two-dimensional WS2 nanoribbon deposition by conversion of pre-patterned amorphous silicon