Browsing by Author "Nguyen, Mai Phuong"
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Publication Characterization of patterned porous low-k dielectrics: surface sealing and residue removal by wet processing/cleaning
Journal article2016, ECS Journal of Solid State Science and Technology, (5) 3, p.N5-N9Publication CVD-Mn(Nx) as copper diffusion barrier for advanced interconnect technologies
Meeting abstract2013, 224th ECS Fall Meeting, 27/10/2013, p.2081Publication HF etching mechanisms of advanced low-k films
; ; ; ; ; Simone, A.Proceedings paper2014, IEEE International Interconnect Technology Conference / Advanced Metallization Conference - IITC/AMC, 20/05/2014, p.155-158