Browsing by Author "Nguyen, Olivier"
Now showing 1 - 3 of 3
- Results Per Page
- Sort Options
Publication CMP of a RU based layer in an advanced Cu low-k stack
Proceedings paper2007-10, International Conference on Planarization CMP Technology - ICPT, 25/10/2007, p.43-48Publication Post-direct-CMP dielectric surface copper contamination: quantitative analysis and impact on dielectric breakdown behaviour
Proceedings paper2009, Advanced Metallization Conference 2008 (AMC2008), 23/09/2008, p.415-429Publication Post-direct-CMP dielectric surface copper contamination: quantitative analysis and impact on dielectric breakdown behaviour
Meeting abstract2008, Advanced Metallization Conference - AMC, 23/09/2008