Browsing by Author "Nielsen, P.F."
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Publication Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions
Journal article2008, Journal of Vacuum Science and Technology B, (26) 1, p.362-367Publication Electrical resistance measurements of individual nanometer-wide Si fins
Meeting abstract2017, EMRS Fall Meeting Symposium M: Material and device integration on silicon for advanced applications, 18/09/2017, p.M.LM.11Publication High precision micro-scale Hall effect characterization method using in-line micro four-point probes
Publication Micro-uniformity during laser anneal: metrology and physics
Proceedings paper2008, Doping Engineering for Front-End Processing, 24/03/2008, p.1070-E01-10Publication On the activation mechanisms of sub-melt laser anneals
Meeting abstract2008, E-MRS Sprng Meeting Symposium I: Front-End Junction and Contact Formation in Future Silicon/Germanium Based Devices, 26/05/2008Publication On the analysis of the activation mechanisms of sub-melt laser anneals
Journal article2008, Materials Science and Engineering B, 154-155, p.24-30