Browsing by Author "Noakes, T."

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High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS

van den Berg, J.A.
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Reading, M.A.
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Parisini, A.
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Kolbe, M.
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Beckhoff, B.
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Ladas, S.
;
Petrik, P.
Meeting abstract
2009, 216th ECS Meeting, 4/10/2009, p.1994
High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS

van den Berg, J.A.
;
Reading, M. A.
;
Parisini, A.
;
Kolbe, M.
;
Beckhoff, B.
;
Ladas, S.
;
Fried, M.
Proceedings paper
2009, Analytical Techniques for Semiconductor Materials and Process Characterization 6, 4/10/2009, p.349-361
High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultra thin high-k Hf based films

Van den berg, J.
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Reading, M.A.
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Armour, D.G.
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Bailey, P.
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Noakes, T.
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Conard, Thierry
Meeting abstract
2009, 5th International Workshop on High-Resolution Depth Profiling, 15/11/2009