Browsing by Author "O'Neill, Anthony G."

Demonstration of a submicron damascene Cu/low-k mechanical sensor to monitor stress in BEOL metallisation

Direct measurement of MOSFET channel strain by means of backside etching and Raman spectroscopy on long-channel devices

In situ X-ray diffraction study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/low-k damascene interconnects using synchrotron radiation

In-situ study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/Low-k damascene interconnects using synchrotron radiation