Browsing by Author "Oka, Hironori"
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Publication Compatibility between polymethacrylate-based extreme ultraviolet resists and TiO(2 )area-selective deposition
Journal article2022, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (21) 4, p.Art. 041407Publication Improving polymethacrylate EUV resists with TiO2 area-selective deposition
Proceedings paper2022, Conference on Advances in Patterning Materials and Processes XXXIX Part of SPIE Advanced Lithography and Patterning Conference, APR 24-MAY 27, 2022, p.120550CPublication SIMS Analysis of Thin EUV Photoresist Films
Journal article2022, ANALYTICAL CHEMISTRY, (94) 5, p.2408-2415