Browsing by Author "Onishi, K."
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Publication A high performance electrostatic MEMS vibration energy harvester with corrugated inorganic SiO2-Si3N4 electret
Proceedings paper2013, Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, 16/06/2013, p.693-696Publication A MEMS 0-level packaging technology based on CuSn/Cu chip capping bonding
Proceedings paper2011, 22nd Micromechanics and Micro systems Europe Workshop - MME, 19/06/2011, p.B27Publication A wafer-level poly-SiGe-based thin film packaging technology demonstrated on a SOI-based high-Q MEM resonator
Proceedings paper2011, 16th International Solid-State Sensors, Acutators and Microsystems Conference - TRANSDUCERS, 5/06/2011, p.982-985Publication High-Q torsional mode Si triangular beam resonators encapsulated using SiGe thin film
Proceedings paper2010, IEEE International Electron Devices Meeting - IEDM, 6/12/2010, p.154-157Publication Torsional mode MEMS resonator using thin film vacuum package
Oral presentation2012, imec-Handai Symposium