Browsing by Author "Pamidighantam, Sayanu"
Now showing 1 - 7 of 7
- Results Per Page
- Sort Options
Publication A novel process for fabricating slender and compliant suspended poly Si micro-mechanical structures with sub-micron gap spacing
Proceedings paper2002, 15th IEEE International Conference on Micro Electro Mechanical Systems, 20/01/2002, p.661-664Publication A wet release process for fabricating slender and compliant suspended micro-mechanical structures
Journal article2003, Sensors and Actuators A: Physical, (103) 1_2, p.202-212Publication Investigation of the hermeticity of BCB-dealed cavities for housing (RF-) MEMS devices
Proceedings paper2002, 15th IEEE International Conference on Micro Electro Mechanical Systems, 20/01/2002, p.677-680Publication Metal and polySi (Ge) micromechanical devices for high frequency application
Proceedings paper2000, Proceedings of SeSens, 30/11/2000, p.673-676Publication Micromachined devices for space telecom applications
Proceedings paper2000, Proceedings 3rd Round Table on Micro/Nano-Technologies for Space, 15/05/2000, p.135-140Publication Pull-in voltage analysis of electrostatically actuated beam structures with fixed-fixed and fixed-free end conditions
Journal article2002, Journal of Micromechanics and Microengineering, (12) 4, p.458-464Publication Pull-in voltage analysis of fixed-fixed beams
Proceedings paper2001, Proceedings 12th Micromechanics Europe Workshop - MME, 16/09/2001, p.269-272