imec Institutional Repository Browsing {{ collection }} by Author "Rangelow, Ivo"

Publication

Advanced etching for nanodevices and 2D materials

de Marneffe, Jean-Francois

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Cooke, Mike

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Goodyear, Andy

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Braithwaite, Nicolas

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Sutton, Yvonne

Meeting abstract

2016, SNM special session at MNE Conference, 19/09/2016

Publication

High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint technology

Lenk, Claudia

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Krivoshapkina, Yana

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Hofmann, Martin

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Lenk, Steve

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Tzvetan, Ivanov

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Rangelow, Ivo

Journal article

2019, Journal of Vacuum Science and Technology B, (37) 2, p.21603

Publication

Molecular glass resists for all-dry high-resolution scanning probe lithography

Neuber, Christian

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Cooke, Mike

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Despont, Michel

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Durig, Urs

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Kastner, Markus

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Knoll, Armin

Oral presentation

2013, 39th International Conference on Micro and Nano Engineering

Publication

Molecular glass resists for scanning probe lithography

Neuber, Christian

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Ringk, Andreas

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Kolb, Tristan

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Wieberger, Floryan

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Strohriegl, Peter

Proceedings paper

2014, Alternative Lithographic Technologies VI, 23/02/2014, p.90491V

Publication

Wafer-level nanoimprint lithography for single electron transistors

Glinsner, Thomas

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Eibelhuber, Martin

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Treiblmayr, Dominik

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Schamberger, Barbara

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Chouiki, M.

Meeting abstract

2017, 16th International Conference on Nanoimprint and Nanoprint Technology - NNT, 8/11/2017

Browsing by Author "Rangelow, Ivo"