Browsing by Author "Reading, M."
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Publication Characterisation of high-k containing nanolayers by reference-free X-ray fluorescence analysis with synchrotron radiation
; Proceedings paper2009, Analytical Techniques for Semiconductor Materials and Process Characterization 6 - ALTECH, 4/10/2009, p.293-300Publication Physical characterization of the metal/high-k layer interaction upon annealing
Proceedings paper2008, Physics and Technology of High-k Dielectrics 6, 12/10/2008, p.433-442Publication Physical characterization of the metal/high-k layer interaction upon annealing
Meeting abstract2008, 214th ECS Meeting, 12/10/2008, p.1965