Browsing by Author "Richter, Robert"
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Publication Dissociative photoionization of EUV lithography photoresist models
Proceedings paper2023, Conference on Advances in Patterning Materials and Processes XL, FEB 27-MAR 01, 2023, p.Art. 124980SPublication Dissociative photoionization of phenyl triflate, a photoacid generator for photolithography, at 92 eV
Journal article2024-04-01, The Journal of Chemical Physics, (160) 13, p.134303Publication Few-femtosecond electron transfer dynamics in photoionized donor–π–acceptor molecules
Publication Isolating the Role of Photoionization for Copolymer Present in Extreme Ultraviolet Photoresists by Gas Phase Electron-Ion Coincidence Experiments
Journal article2025-JAN 14, ACS APPLIED POLYMER MATERIALS